Process variation-aware mask optimization with iterative improvement by subgradient method and boundary ﬂipping

Publication Information

Title

Japanese:
English:	Process variation-aware mask optimization with iterative improvement by subgradient method and boundary ﬂipping

Author

Japanese:	東梨奈, 小平行秀, 松井知己, 高橋篤司, 児玉親亮.
English:	Rina Azuma, Yukihide Kohira, Tomomi Matsui, Atsushi Takahashi, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE 11328, Design-Process-Technology Co-optimization for Manufacturability XIV, 113280O

Volume, Number, Page

pp. 1-7

Published date

Mar. 23, 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI