Home >

news Help

Publication Information


Title
Japanese:大面積薄膜の安定した曲面貼付に向けた弾性梁配列を有する双極型静電吸着デバイスの設計と条件評価 
English: 
Author
Japanese: 吉田周平, 田岡祐樹, 齋藤滋規.  
English: Shuhei Yoshida, Yuki Taoka, Shigeki SAITO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 2023 
Publisher
Japanese: 
English: 
Conference name
Japanese:2023年度精密工学会春季大会学術講演会 
English: 
Conference site
Japanese: 
English: 

©2007 Institute of Science Tokyo All rights reserved.