Influence of heatinduced changeable stiffness a t the contact interface o n the gripping force of a bipolar electrostatic chuck

Publication Information

Title

Japanese:
English:	Influence of heatinduced changeable stiffness a t the contact interface o n the gripping force of a bipolar electrostatic chuck

Author

Japanese:	Jeremy Gavriel, 田岡祐樹, 齋藤滋規.
English:	Jeremy Gavriel, Yuki Taoka, shigeki saito.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2023

Publisher

Japanese:
English:

Conference name

Japanese:	2023年度精密工学会春季大会学術講演会
English:

Conference site

Japanese:
English: