Influence of the surface conductivity of a polymer film on the attractive force of a bipolar electrostatic chuck

Publication Information

Title

Japanese:
English:	Influence of the surface conductivity of a polymer film on the attractive force of a bipolar electrostatic chuck

Author

Japanese:	Jeremy Gavriel, 田岡祐樹, 齋藤滋規.
English:	Jeremy Gavriel, Yuki Taoka, shigeki saito.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MRS 2022 Spring

Conference site

Japanese:
English:	Hawaii