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Title
Japanese:TEM-PED を用いた TiN/Si3N4 接合界面における歪解析 
English: 
Author
Japanese: 能川 玄也, 高野 俊, 沖代 賢次, 岡本 篤志, 磯部 敏宏, 中島 章.  
English: Takashi Nogawa, 高野 俊, 沖代 賢次, 岡本 篤志, Toshihiro Isobe, Akira Nakajima.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 10, 2023 
Publisher
Japanese: 
English: 
Conference name
Japanese:日本セラミックス協会2023年会 
English: 
Conference site
Japanese:神奈川県 
English: 

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