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Title
Japanese:トモグラフィック発光分光計測による窒素誘導結合プラズマの振動温度・回転温度の空間分布診断 
English:Diagnosis of Spatial Distribution of Vibrational and Rotational Temperatures of Nitrogen Inductively Coupled Plasma by Tomographic Optical Emission Spectroscopic Measurement 
Author
Japanese: 米田 和真, 山下 雄也, 土居 謙太, 清田 哲司, 浅川 慶一郎, 石 健太, 根津 篤, 赤塚 洋.  
English: Kazuma Yoneda, Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Keiichiro Asakawa, Kenta Ishi, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:2023年第70回応用物理学会春季学術講演会 講演予稿集 
English:Extended abstracts of the 70th JSAP Spring Meeting 2023 
Volume, Number, Page         07-008
Published date Feb. 27, 2023 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physcs 
Conference name
Japanese:2023年第70回応用物理学会春季学術講演会 
English:The 70th JSAP Spring Meeting 2023 
Conference site
Japanese:東京 
English:Tokyo 
Official URL https://confit.atlas.jp/guide/event/jsap2023s/subject/15p-B309-7/tables?cryptoId=
 
Abstract To gain a better understanding of discharges specific to molecular gases, it is important to investigate the characteristics of nitrogen plasma, as a typical example. In inductively coupled plasma (ICP), which is applied to semiconductor etching processes, the spatial distribution of rotational temperature that approximates the gas temperature is crucial. In this study, nitrogen inductively coupled plasma was measured by tomographic optical emission spectroscopy. The spatial distribution of vibrational and rotational temperatures of N2 and N2+ were diagnosed by spectral fitting.

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