Development of a Compliant Bipolar Electrostatic Chuck Having 3D-Printed Elastically-Deformable Beams for Handling Large Film

Publication Information

Title

Japanese:
English:	Development of a Compliant Bipolar Electrostatic Chuck Having 3D-Printed Elastically-Deformable Beams for Handling Large Film

Author

Japanese:	林輝道, 田岡祐樹, 齋藤滋規.
English:	Terumichi Hayashi, Yuki Taoka, Shigeki Saito.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MRS Fall Meeting and Exhibit 2019

Conference site

Japanese:
English: