Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers

Publication Information

Title

Japanese:
English:	Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers

Author

Language

English

Journal/Book name

Japanese:
English:	49th international conference on Micro and Nano Engineering (MNE2023)

Volume, Number, Page

Published date

Sept. 25, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MNE2023

Conference site

Japanese:
English:	Berlin