Grain-Size Enlargement of MoS2 Film by Low-Rate Sputtering with Molybdenum Grid

Publication Information

Title

Japanese:
English:	Grain-Size Enlargement of MoS2 Film by Low-Rate Sputtering with Molybdenum Grid

Author

Japanese:	今井慎也, 小野凌, 宗田伊理也, 角嶋邦之, 辰巳哲也, 冨谷茂隆, 筒井一生, 若林整.
English:	Shinya Imai, Ryo Ono, Iriya Muneta, Kuniyuki Kakushima, Tetsuya Tatsumi, Shigetaka Tomiya, Kazuo Tsutsui, Hitoshi Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 8, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE Electron Devices Technology and Manufacturing Conference (EDTM)

Conference site

Japanese:
English:	Seoul

Official URL

DOI