Self-heating and Short-Channel Effect Immunity with Partial-Bottom-Dielectric-Isolation for Gate-All-Around Nano-Sheet FETs

Publication Information

Title

Japanese:
English:	Self-heating and Short-Channel Effect Immunity with Partial-Bottom-Dielectric-Isolation for Gate-All-Around Nano-Sheet FETs

Author

Japanese:	WANG PEILONG, 堀敦, 宗田伊理也, 川那子高暢, 角嶋邦之, 筒井一生, 若林整.
English:	Peilong Wang, Atsushi Hori, Iriya Muneta, Takamasa Kawanago, Kuniyuki Kakushima, Kazuo Tsutsui, Hitoshi Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 17, 2023

Publisher

Japanese:
English:

Conference name

Japanese:	第70回応用物理学会春季学術講演会
English:	70th JSAP Spring meeting

Conference site

Japanese:	東京
English:	Tokyo