Observation of Negative Piezoelectricity in HfO2-Based Thin Film Capacitors

Publication Information

Title

Japanese:
English:	Observation of Negative Piezoelectricity in HfO2-Based Thin Film Capacitors

Author

Japanese:	Pratyush Buragohain, Sangita Dutta, Haidong Lu, Sebastjan Glinšek, Hugo Aramberri, Claudia Richter, Terrence Mittmann, Pamenas Kariuki, 三村和仙, 清水荘雄, 舟窪浩, Uwe Schroeder, Emmanuel Defay.
English:	Pratyush Buragohain, Sangita Dutta, Haidong Lu, Sebastjan Glinšek, Hugo Aramberri, Claudia Richter, Terrence Mittmann, Pamenas Kariuki, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo, Uwe Schroeder, Emmanuel Defay.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 27, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2022 ISAF-PFM-ECAPD Joint Conference

Conference site

Japanese:
English:	Tours