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Title
Japanese:Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討 
English:Study of simplified analytical damping constant model of Au perforated proof-mass MEMS capacitive accelerometer 
Author
Japanese: 御宿 希祐, 大西哲, TENNETIDEVI, CHAKRABORTYP, 町田克之, 飯田慎一, 小西敏文, 曽根正人, 三宅美博, 伊藤浩之.  
English: Kisuke Miyado, Akira Onishi, Devi.Srujana Tenneti, Parthojit CHAKRABORTY, Katsuyuki Machida, Shinichi Iida, Toshifumi Konishi, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Aug. 3, 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese:第13回集積化MEMS技術研究ワークショップ 
English: 
Conference site
Japanese:東京 
English: 

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