1 軸差動型CMOS-MEMS加速度センサのFB電圧による錘変位特性の検討

Publication Information

Title

Japanese:	1 軸差動型CMOS-MEMS加速度センサのFB電圧による錘変位特性の検討
English:	Dependence of proof mass displacement on applied voltage for single differential CMOS-MEMS capacitive accelerometer

Author

Japanese:	御宿希祐, Tenneti Devi Srujana, 町田克之, 栗岡智行, Tso-Fu Mark Chang, 曽根正人, 三宅美博, 伊藤浩之.
English:	Kisuke Miyado, Devi.Srujana Tenneti, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

p04

Published date

Aug. 2, 2023

Publisher

Japanese:
English:

Conference name

Japanese:	第14回集積化MEMS技術研究ワークショップ
English:

Conference site

Japanese:	愛知県
English: