The electron temperature, electron density, and electron energy distribution function(EEDF) of an atmospheric pressure non-equilibrium Ar plasma in a dielectric barrier discharge are estimated by optical emission spectroscopy measurements. Under the assumption that EEDF is represented by a linear combination of generalized EEDF, the following analyses were performed:
(1) Fitting the continuum spectrum calculated by bremsstrahlung
(2) Fitting the excited state number density calculated by the collisional radiation model to the experimental value obtained from the line spectrum
(3) Applying (2) within the range where the error is small in a continuous spectrum analysis
Combining continuum spectrum analysis and line spectrum analysis improves reliablity of estimated values.