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Title
Japanese:トモグラフィック発光分光計測によるプラズマ診断におけるチャンバ内壁反射光が電子温度・電子密度診断に及ぼす影響 
English:Influence of reflected light from the chamber inner wall upon electron temperature and density in plasma diagnostics by tomographic optical emission spectroscopic measurement 
Author
Japanese: 山下 雄也, 土居 謙太, 清田 哲司, 菊地 航行, 石 健太, 渡邊 修平, 根津 篤, 赤塚 洋.  
English: Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Wataru Kikuchi, Kenta Ishi, Shuhei Watanabe, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第84回応用物理学会秋季学術講演会 講演予稿集 
English:Extended abstracts of the 84th JSAP Autumn Meeting 
Volume, Number, Page         07-147
Published date Sept. 5, 2023 
Publisher
Japanese:公益社団法人 応用物理学会 
English:Japan Society of Appplied Physics 
Conference name
Japanese:2023年第84回応用物理学会秋季学術講演会 
English:The 84th JSAP Autumn Meeting 
Conference site
Japanese:熊本 
English:Kumamoto 
Official URL https://pub.confit.atlas.jp/ja/event/jsap2023a/presentation/23p-A301-3
 
Abstract In tomographic optical emission spectroscopic measurement of plasmas, multiple reflections on the chamber inner wall can increase the measurement uncertainty. In this study, we experimentally investigated the influence of reflectance of the chamber inner wall and the layout of line-of-sights on the reconstructed image. The use of a pressurized, vapor-sealed, anodized aluminum inner wall in the chamber reduced the distortion of the reconstructed image. Based on the collisional radiation model, the spatial distribution of electron temperature and electron density were diagnosed.

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