Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer

Publication Information

Title

Japanese:
English:	Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer

Author

Language

English

Journal/Book name

Japanese:
English:	Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02

Volume, Number, Page

Published date

Sept. 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2023 International Conference on Solid State Devices and Materials

Conference site

Japanese:
English:	Aichi

Official URL