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Title
Japanese:Au積層メタル技術によるMEMSデバイスの九十九折ばね定数ばらつき抑制の検討 
English:Supression of process variation of serpentine spring constant for MEMS devices by gold multi-layer metal technology 
Author
Japanese: 御宿 希祐, 大西 哲, Devi Srujana Tenneti, 町田 克之, 栗岡智行, CHAKRABORTYP, Tso-Fu Mark Chang, 曽根正人, 三宅美博, 伊藤浩之.  
English: Kisuke Miyado, Akira Onishi, Devi.Srujana Tenneti, Katsuyuki Machida, Tomoyuki Kurioka, Parthojit CHAKRABORTY, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito.  
Language Japanese 
Journal/Book name
Japanese:第84回応用物理学会秋季学術講演会 講演予稿集 
English: 
Volume, Number, Page Vol. 20p-B201-1       
Published date Sept. 19, 2023 
Publisher
Japanese: 
English: 
Conference name
Japanese:第84回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese:熊本県 
English: 

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