Fabrication of CoFeB–SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors

Publication Information

Title

Japanese:
English:	Fabrication of CoFeB–SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors

Author

Japanese:	高村陽太, 仁田帆南, 河原和馬, 金子忠幸, 石戸亮祐, 宮﨑達也, 細田尚揮, 藤﨑敬介, 中川茂樹.
English:	Y. Takamura, H. Nitta, K. Kawahara, T. Kaneko, R. Ishido, T. Miyazaki, N. Hosoda, K. Fujisaki, S. Nakagawa.

Language

English

Journal/Book name

Japanese:
English:	IEEE Transactions on Magnetics

Volume, Number, Page

Vol. 59 Issue 11 pp. 1-4

Published date

July 6, 2023

Publisher

Japanese:
English:	IEEE

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

Official URL

DOI