Fabrication and Characterization CoZrO Films Deposited by Facing Targets Reactive Sputtering for Micromagnetic Inductors

Publication Information

Title

Japanese:
English:	Fabrication and Characterization CoZrO Films Deposited by Facing Targets Reactive Sputtering for Micromagnetic Inductors

Author

Japanese:	仁田帆南, 高村陽太, 金子忠幸, 中川茂樹.
English:	H. Nitta, Y. Takamura, T. Kaneko, S. Nakagawa.

Language

English

Journal/Book name

Japanese:
English:	IEEE Magn. Lett.

Volume, Number, Page

vol. 14 pp. 1-5

Published date

Sept. 28, 2023

Publisher

Japanese:
English:	IEEE

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI