A formulation of mask optimization into QUBO model for Ising machines

Publication Information

Title

Japanese:
English:	A formulation of mask optimization into QUBO model for Ising machines

Author

Japanese:	小平行秀, Haruki Nakayama, Naoki Nonaka, 松井知己, 高橋篤司, Chikaaki Kodama.
English:	Yukihide Kohira, Haruki Nakayama, Naoki Nonaka, Tomomi Matsui, Atsushi Takahashi, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE 12751, Photomask Technology 2023, 127511D

Volume, Number, Page

Published date

Nov. 21, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	Monterey California

DOI