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Title
Japanese:誘導結合酸素プラズマの発光分光計測 
English:Optical Emission Spectroscopic Measurement of Inductively Coupled Oxygen Plasma 
Author
Japanese: 渡邊修平, 土居謙太, 清田哲司, 山下雄也, 菊地航行, 石健太, 根津篤, 赤塚洋.  
English: Shuhei Watanabe, Kenta Doi, Tetsuji Kiyota, Yuya Yamashita, Wataru Kikuchi, Kenta Ishi, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第41回 プラズマプロセシング研究会 プロシーディングス 
English:Proceedings of 41st Symposium on Plasma Processing (SPP-41) 
Volume, Number, Page         pp. 82 - 83
Published date Jan. 19, 2024 
Publisher
Japanese:応用物理学会プラズマエレクトロニクス分科会 
English:Plasma Electronics Division, Japan Society of Applied Physics 
Conference name
Japanese:第41回プラズマプロセシング研究会 
English:The 41st Symposium on Plasma Processing 
Conference site
Japanese:東京 
English:Tokyo 
Official URL https://gakkai-gran.jp/spp41/
 
Abstract The vertical plane spatial distribution of electron temperature Te and that of electron density Ne in inductively coupled oxygen plasma were obtained using optical emission spectroscopic measurement and spectral tomography algorithm. The results showed Te and Ne changed with gas pressure and RF power input. In addition, it is generally found that Te was higher at the center of the ICP apparatus and Ne was low at the lower center of it.

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