Home >

news Help

Publication Information


Title
Japanese:改良分光トモグラフィアルゴリズムによるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断 
English:Spatial Diagnosis of Electron Temperature and Density of Argon Inductively Coupled Plasma by Improved Spectral Tomography Algorithm 
Author
Japanese: 山下雄也, 土居謙太, 清田哲司, 菊地航行, 石健太, 渡邊修平, 根津篤, 赤塚洋.  
English: Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Wataru Kikuchi, Kenta Ishi, Shuhei Watanabe, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第41回 プラズマプロセシング研究会 プロシーディングス 
English:Proceedings of 41st Symposium on Plasma Processing (SPP-41) 
Volume, Number, Page         pp. 64 - 65
Published date Jan. 20, 2024 
Publisher
Japanese:応用物理学会プラズマエレクトロニクス分科会 
English:Plasma Electronics Division, Japan Society of Applied Physics 
Conference name
Japanese:第41回 プラズマプロセシング研究会 
English:The 41st Symposium on Plasma Processing (SPP-41) 
Conference site
Japanese:東京 
English:Tokyo 
Official URL https://gakkai-gran.jp/spp41/
 
Abstract Conventional tomography algorithms do not adequately take into account the metrological properties of plasma spectroscopy. An improved spectral tomography algorithm for optical emission spectroscopic measurement of plasmas is proposed. Furthermore, electron temperature and electron density were diagnosed based on a collisional-radiative model. The effect of line-of-sight placement on the diagnostic results of electron temperature and electron density was discussed.

©2007 Institute of Science Tokyo All rights reserved.