Home >

news Help

Publication Information


Title
Japanese: 
English:Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model 
Author
Japanese: 山下雄也, 土居謙太, 清田哲司, 石健太, 渡邊修平, 菊地航行, 根津篤, 赤塚洋.  
English: Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Kenta Ishi, Shuhei Watanabe, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:J. Vac. Sci. Technol. A 
Volume, Number, Page Vol. 42    No. 2    023003
Published date Jan. 29, 2024 
Publisher
Japanese: 
English:AIP Publishing 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL https://pubs.aip.org/avs/jva/article/42/2/023003/3222757/Spatial-distribution-diagnosis-of-electron
 
DOI https://doi.org/10.1116/6.0003209
Abstract There are few reported cases in which the spatial distribution of spectral emission coefficients of plasmas from tomographic optical emission spectroscopy measurements is analyzed based on a collisional-radiative model to diagnose the spatial distribution electron temperature of Te and density Ne. This study aimed at in situ diagnosis of process plasma. The spectral radiance of 18 lines-of-sight was measured simultaneously in argon inductively coupled plasma. The spatial distribution of the excited level number density distribution was calculated from the spatial distribution of spectral emission coefficients obtained from spectral tomography calculations. The three-dimensional distribution of Te and Ne was analyzed using a collisional-radiative model from the obtained spatial distribution of the excited levels number density. The effects of power and pressure on the dependence of the spatial distribution of Te and Ne were discussed. Furthermore, data processing methods for spectral tomographic measurements with coarse wavelength resolution were also discussed.

©2007 Tokyo Institute of Technology All rights reserved.