Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology

Publication Information

Title

Japanese:
English:	Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology

Author

Japanese:	御宿希祐, TENNETI DEVI, 大西哲, 町田克之, 栗岡智行, Chang Tso-Fu Mark, 曽根正人, 三宅美博, 伊藤浩之.
English:	Kisuke Miyado, Devi Srujana Tenneti, Akira Onishi, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 63 No. 4 p. 04SP23

Published date

Feb. 9, 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI