Optimization of deposition parameters for porous a-IGZO thin films using machine learning regression

Publication Information

Title

Japanese:	Optimization of deposition parameters for porous a-IGZO thin films using machine learning regression
English:	Optimization of deposition parameters for porous a-IGZO thin films using machine learning regression

Author

Japanese:	Atsushi Shimizu, Keisuke Ide, Takayoshi Katase, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya.
English:	Atsushi Shimizu, Keisuke Ide, Takayoshi Katase, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Feb. 2024

Publisher

Japanese:
English:

Conference name

Japanese:	STAC - D2MatE 2024
English:	STAC - D2MatE 2024

Conference site

Japanese:	つくば
English:	Tsukuba