Attractive Force Increased by Rotational Degree Of-Freedom Tip Structure Used in Beam Structure Electrostatic Chucks

Publication Information

Title

Japanese:
English:	Attractive Force Increased by Rotational Degree Of-Freedom Tip Structure Used in Beam Structure Electrostatic Chucks

Author

Japanese:	許三川, 田岡祐樹, 齋藤滋規.
English:	Sanchuan XU, Yuki Taoka, Shigeki SAITO.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2024

Publisher

Japanese:
English:

Conference name

Japanese:	2024年度精密工学会春季大会学術講演会
English:

Conference site

Japanese:
English: