Home >

news Help

Publication Information


Title
Japanese:双極型静電吸着デバイスの複曲面対応を目指したオーセティックパターンを用いた複曲面生成構造の開発 
English: 
Author
Japanese: 吉本純平, 齋藤滋規, 祐樹 田岡.  
English: Jumpei Yoshimoto, Shigeki SAITO, Yuki Taoka.  
Language Japanese 
Journal/Book name
Japanese:精密工学会学術講演会講演論文集 
English:精密工学会学術講演会講演論文集 
Volume, Number, Page Vol. 2023A        pp. 17-18
Published date Sept. 2023 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.11522/pscjspe.2023A.0_17

©2007 Institute of Science Tokyo All rights reserved.