Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure

Publication Information

Title

Japanese:	Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure
English:	Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure

Author

Japanese:	Yuki Taoka, 林輝道, 許三川, 齋藤滋規.
English:	Yuki Taoka, Terumichi Hayashi, Sanchuan XU, Shigeki SAITO.

Language

English

Journal/Book name

Japanese:	Advanced Robotics
English:	Advanced Robotics

Volume, Number, Page

Vol. 37 No. 23 pp. 1507-1519

Published date

Nov. 2023

Publisher

Japanese:	Taylor & Francis
English:	Taylor & Francis

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI