Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes

Publication Information

Title

Japanese:	Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes
English:	Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes

Author

Japanese:	Yuki Taoka, 凌智寛, 許三川, 齋藤滋規.
English:	Yuki Taoka, Tomohiro Ryo, Sanchuan XU, Shigeki SAITO.

Language

English

Journal/Book name

Japanese:	Engineering Research Express
English:	Engineering Research Express

Volume, Number, Page

Vol. 6 No. 1 pp. 015046

Published date

Jan. 2024

Publisher

Japanese:	IOP Publishing
English:	IOP Publishing

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI