Effect of Heat-Induced Adjustable Stiffness at the Contact Interface on the Gripping Force of a Bipolar Electrostatic Chuck

Publication Information

Title

Japanese:
English:	Effect of Heat-Induced Adjustable Stiffness at the Contact Interface on the Gripping Force of a Bipolar Electrostatic Chuck

Author

Japanese:	齋藤滋規, Jeremy Gavriel, ZHOU Juntian, 田岡祐樹.
English:	Shigeki Saito, Jeremy Gavriel, Juntian Zhou, Yuki Taoka.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2023 MRS Fall Meeting

Conference site

Japanese:
English:	Boston