Pre-training CNN for fast EUV lithography simulation including M3D effects

Publication Information

Title

Japanese:
English:	Pre-training CNN for fast EUV lithography simulation including M3D effects

Author

Japanese:	田邊容由, 神宮司明良, 高橋篤司.
English:	Hiroyoshi Tanabe, Akira Jinguji, Atsushi Takahashi.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE 12954, DTCO and Computational Patterning III, 129540I

Volume, Number, Page

Published date

Apr. 10, 2024

Publisher

Japanese:
English:	Society of Photo-Optical Instrumentation Engineers (SPIE)

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

DOI