No-Heating deposition of ferroelectric x%Y-doped (100–x%)(Hf1−yZry)O2 films

Publication Information

Title

Japanese:
English:	No-Heating deposition of ferroelectric x%Y-doped (100–x%)(Hf1−yZry)O2 films

Author

Japanese:	三村和仙, 志村礼司郎, 舘山明紀, Yoshiko Nakamura, 白石貴久, 舟窪浩.
English:	Takanori Mimura, Reijiro Shimura, Akinori Tateyama, Yoshiko Nakamura, Takahisa Shiraishi, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Phys. Status Solidi A

Volume, Number, Page

2023 2300100-1-6

Published date

May 3, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI