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Title
Japanese:静電吸着機構を用いた交流圧力源システムの提案 
English: 
Author
Japanese: 川合光, 吉田和弘, 金俊完.  
English: Hikaru Kawai, KAZUHIRO YOSHIDA, Joon-wan KIM.  
Language Japanese 
Journal/Book name
Japanese:日本機械学会第23回機素潤滑設計部門講演会予稿集 
English: 
Volume, Number, Page         2B1-5
Published date Apr. 2024 
Publisher
Japanese: 
English: 
Conference name
Japanese:日本機械学会第23回機素潤滑設計部門講演会 
English: 
Conference site
Japanese: 
English: 

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