Evaluation of the Effect of Heat Treatment on the Structural Stability of  Au Micro-Cantilevers with Ti/Au Multi-layered Structures

Publication Information

Title

Japanese:
English:	Evaluation of the Effect of Heat Treatment on the Structural Stability of Au Micro-Cantilevers with Ti/Au Multi-layered Structures

Author

Japanese:	宮井良介, 栗岡智行, 陳君怡, Chang Tso-Fu Mark, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)

Volume, Number, Page

Published date

Sept. 16, 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:	50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)

Conference site

Japanese:
English: