Weakly guiding approximation of a three dimensional waveguide model for extreme ultraviolet lithography simulation

Publication Information

Title

Japanese:
English:	Weakly guiding approximation of a three dimensional waveguide model for extreme ultraviolet lithography simulation

Author

Japanese:	田邊容由, 神宮司明良, 高橋篤司.
English:	Hiroyoshi Tanabe, Akira Jinguji, Atsushi Takahashi.

Language

English

Journal/Book name

Japanese:
English:	Journal of the Optical Society of America A

Volume, Number, Page

Vol. 41 Issue 8 pp. 1491-1499

Published date

July 8, 2024

Publisher

Japanese:
English:	Optica Publishing Group

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

DOI