Identification of compressive strain in thin ferroelectric Al1–xScxN films by Raman spectroscopy

Publication Information

Title

Japanese:	Identification of compressive strain in thin ferroelectric Al1–x Sc x N films by Raman spectroscopy
English:	Identification of compressive strain in thin ferroelectric Al1–xScxN films by Raman spectroscopy

Author

Japanese:	時田幸村, 星井拓也, 若林整, 筒井一生, 角嶋邦之.
English:	Yukimura Tokita, Takuya Hoshii, Hitoshi Wakabayashi, KAZUO TSUTSUI, Kuniyuki KAKUSHIMA.

Language

English

Journal/Book name

Japanese:	Japanese Journal of Applied Physics
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Volume 63 Number 4 04SP31

Published date

Apr. 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI