Characterization of Structural and Mechanical Properties of DLC Films Deposited on the Surface of Minute-scale 3D Objects: Changes in the incident behavior of carbon ions

Publication Information

Title

Japanese:
English:	Characterization of Structural and Mechanical Properties of DLC Films Deposited on the Surface of Minute-scale 3D Objects: Changes in the incident behavior of carbon ions

Author

Japanese:	Yuto Tameno, 平田祐樹, Takumi Ishikawa, 赤坂大樹, 大竹尚登, Hiroshige Matsuoka.
English:	Yuto Tameno, Yuki Hirata, Takumi Ishikawa, Hiroki Akasaka, Naoto Ohtake, Hiroshige Matsuoka.

Language

English

Journal/Book name

Japanese:	Surface and Coating Technology
English:

Volume, Number, Page

490

Published date

Aug. 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: