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Title
Japanese:炭素イオン流成膜法による3次元DLC成膜技術の開発 
English: 
Author
Japanese: 黒崎裕介, 平田祐樹.  
English: Yusuke Kurosaki, Yuki Hirata.  
Language Japanese 
Journal/Book name
Japanese:表面技術 
English: 
Volume, Number, Page 75       
Published date July 2024 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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