Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures  caused by Thermal Treatment

Publication Information

Title

Japanese:	Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures caused by Thermal Treatment
English:	Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures caused by Thermal Treatment

Author

Japanese:	Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.
English:	Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	CPIT2024, New Method of Damage and Failure Analysis of Structural Part

Volume, Number, Page

Published date

Oct. 14, 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:	CPIT2024, New Method of Damage and Failure Analysis of Structural Part

Conference site

Japanese:
English:	OSTRAVA,