集積レーザ素子のウェハレベル自動計測

Publication Information

Title

Japanese:	集積レーザ素子のウェハレベル自動計測
English:	Characterization of Integrated Lasers by a Wafer-level Probing System

Author

Japanese:	堀川剛, 吉田俊, 西山伸彦.
English:	Tsuyoshi Horikawa, Suguru Yoshida, Nobuhiko Nishiyama.

Language

Japanese

Journal/Book name

Japanese:	第85回応用物理学会秋季学術講演会予稿集
English:	The 85th JSAP Autumn Meeting 2024 Extended Abstracts

Volume, Number, Page

16a-A25-1

Published date

Sept. 16, 2024

Publisher

Japanese:
English:

Conference name

Japanese:	第８５回応用物理学会秋季学術講演会
English:	The 85th JSAP Autumn Meeting 2024

Conference site

Japanese:	新潟市
English: