Fabrication of In2S3 and In–Ga–S Thin Films via Atmosphere-Controlled Fine-Channel Mist Chemical Vapor Deposition

Publication Information

Title

Japanese:
English:	Fabrication of In2S3 and In–Ga–S Thin Films via Atmosphere-Controlled Fine-Channel Mist Chemical Vapor Deposition

Author

Japanese:	船木顕広, 荒木耀平, 西村昂人, 山田明.
English:	Akihiro Funaki, Yohei Araki, Takahito Nishimura, Akira Yamada.

Language

English

Journal/Book name

Japanese:
English:	Phys. Status Solidi RRL

Volume, Number, Page

Published date

Sept. 16, 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: