Material Property Control of Multi-layered Ti/Au Microcomponents by Electroplating Toward Ultra high-Sensitive MEMS Inertial Sensors

Publication Information

Title

Japanese:
English:	Material Property Control of Multi-layered Ti/Au Microcomponents by Electroplating Toward Ultra high-Sensitive MEMS Inertial Sensors

Author

Japanese:	曽根正人, Chang Tso-Fu Mark, 栗岡智行, 陳君怡, 町田克之, 伊藤浩之, 三宅美博.
English:	Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake.

Language

English

Journal/Book name

Japanese:
English:	2024 ICGET-Tw

Volume, Number, Page

Published date

Nov. 9, 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2024 ICGET-Tw: The 2024 International Conference on Green Electrochemical Technologies and the 2024 Annual Meeting of Electrochemical Society of Taiwan

Conference site

Japanese:
English:	Taichun