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Title
Japanese: 
English:Optical Emission Spectroscopic Measurement of Electron Temperature and Density of Oxygen ICP 
Author
Japanese: 赤塚洋, 渡邉修平, 土居謙太, 清田哲治, 山下雄也, 菊地航行, 石健太, 叶宇晨, 根津篤.  
English: H. Akatsuka, S. Watanabe, K. Doi, T. Kiyota, Y. Yamashita, W. Kikuchi, K. Ishi, Y. Ye, A. Nezu.  
Language English 
Journal/Book name
Japanese: 
English:Proc. DPS2024 
Volume, Number, Page         pp. 81-82
Published date Nov. 14, 2024 
Publisher
Japanese: 
English:International Symposium on Dry Process Organizing Committee 
Conference name
Japanese: 
English:The 45th International Symposium on Dry Process (DPS2024) 
Conference site
Japanese:千歳 
English:Chitose 
Official URL http://www.dry-process.org/2024/poster_program.html
 
Abstract The 2D-xz distribution of electron temperature Te and density Ne in oxygen inductively coupled plasma (ICP) are obtained using optical emission spectroscopic (OES) measurement and spectral tomography algorithm. It is found that Te was higher at the center of the ICP apparatus while Ne was lower at the center, which is discussed in terms of molecular processes in the oxygen ICP.

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