Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements

Publication Information

Title

Japanese:	トモグラフィー発光分光法およびラングミュアプローブ計測によるアルゴン二周波誘導結合プラズマの電子温度と密度の診断
English:	Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements

Author

Japanese:	叶宇晨, 土居謙太, 清田哲司, 渡邊修平, 島谷和希, 櫻井彩貴, 山下雄也, 菊地航行, 根津篤, 赤塚洋.
English:	Yuchen Ye, Kenta Doi, Tetsuji Kiyota, Shuhei Watanabe, Kazuki Shimatani, Ayaki Sakurai, Yuya Yamashita, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka.

Language

English

Journal/Book name

Japanese:	第41回プラズマ・核融合学会年会オンライン予稿集
English:	Extended Abstracts of the 41st Annual Meeting of JSPF

Volume, Number, Page

Published date

2024

Publisher

Japanese:	一般社団法人プラズマ・核融合学会
English:	The Japan Society of Plasma Science and Nuclear Fusion Research

Conference name

Japanese:	第41回プラズマ・核融合学会年会
English:	The 41st annual meeting of The Japan Society of Plasma Science and Nuclear Fusion Research

Conference site

Japanese:	東京
English:	Tokyo

Official URL