高感度MEMS加速度センサ実現のための金めっき材料設計

Publication Information

Title

Japanese:	高感度MEMS加速度センサ実現のための金めっき材料設計
English:	Gold plating material design for high-sensitivity MEMS accelerometer

Author

Japanese:	曽根正人, Tso-Fu Mark Chang, 栗岡智行, 名越貴志, 町田克之, 伊藤浩之, 三宅美博.
English:	Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Takashi Nagoshi, Katsuyuki Machida, HIroyuki Ito, Yoshihiro Miyake.

Language

Japanese

Journal/Book name

Japanese:	第16回集積化MEMS技術研究会
English:	16th Meeting of The stugy group of the Integrated MEMS

Volume, Number, Page

Published date

June 6, 2025

Publisher

Japanese:
English:

Conference name

Japanese:	第16回集積化MEMS技術研究会
English:	16th Meeting of The stugy group of the Integrated MEMS

Conference site

Japanese:
English: