Micro-Mechanical Properties of Annealed Electrodeposited Gold for Design of MEMS Structural Components

Publication Information

Title

Japanese:
English:	Micro-Mechanical Properties of Annealed Electrodeposited Gold for Design of MEMS Structural Components

Author

Japanese:	飯間翔太, 栗岡智行, 菅野翔太, 陳君怡, Chang Tso-Fu Mark, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Shota Iima, Tomoyuki Kurioka, Shota Kanno, Chun Yi-Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	MNE2025 Southampton

Volume, Number, Page

Published date

Sept. 15, 2025

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MNE2025 Southampton

Conference site

Japanese:
English:	Southampton