Characteristics Comparison of Interlayer Couplers Between Silicon Oxynitride and Silicon Waveguide Layers

Publication Information

Title

Japanese:
English:	Characteristics Comparison of Interlayer Couplers Between Silicon Oxynitride and Silicon Waveguide Layers

Author

Japanese:	姚凱繽, MOATAZShaher Anis Mahmoud Eissa, 堀川剛, 西山伸彦.
English:	Kaibin Yao, Shaher Anis Mahmoud Eissa Moataz, Tsuyoshi Horikawa, Nobuhiko Nishiyama.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 7, 2025

Publisher

Japanese:
English:

Conference name

Japanese:	第86回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	名城大学
English: