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Title
Japanese:OFDR法を用いたウェーハレベル光集積デバイス特性検査(2) ‐透過及び反射プロファイルに見られる導波路多重反射の定式化‐ 
English: 
Author
Japanese: 堀川 剛, 西山 伸彦.  
English: Tsuyoshi Horikawa, Nobuhiko Nishiyama.  
Language Japanese 
Journal/Book name
Japanese:第８６回応用物理学会秋季学術講演会講演予稿集 
English: 
Volume, Number, Page        
Published date Sept. 7, 2025 
Publisher
Japanese: 
English: 
Conference name
Japanese:第８６回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese:名古屋 
English: 

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