レーザー加工によるd33モードの圧電MEMSデバイスの開発

Publication Information

Title

Japanese:	レーザー加工によるd33モードの圧電MEMSデバイスの開発
English:	Development of d33-mode piezoelectric MEMS devices using laser etching process

Author

Japanese:	宋俊東, 寺島日海, 柴尾直樹, 小野晋吾, 中嶋宇史, 春本高志, 史蹟, 岡村総一郎.
English:	Jundong Song, Hiumi Terashima, Naoki Shibao, Shingo Ono, Takashi Harumoto, Ji Shi, Takashi Nakajima, Soichiro Okamura.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 14, 2025

Publisher

Japanese:
English:

Conference name

Japanese:	第42回強誘電体会議
English:

Conference site

Japanese:	京都
English: