High-Efficiency Vertical Coupler between Si and Low-index (~1.6) SiON Waveguide with Low Polarization Dependance Loss

Publication Information

Title

Japanese:
English:	High-Efficiency Vertical Coupler between Si and Low-index (~1.6) SiON Waveguide with Low Polarization Dependance Loss

Author

Japanese:	陳浩宇, MOATAZ Shaher Anis Mahmoud Eissa, 姚凱繽, 堀川剛, 川原啓輔, 西山伸彦.
English:	Haoyu Chen, Moataz Eissa, Kaibin Yao, Tsuyoshi Horikawa, Keisuke Kawahara, Nobuhiko Nishiyama.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 73rd JSAP Spring Meeting 2026

Conference site

Japanese:
English:	Tokyo